Sun Haishan, Chen Antao, Olbricht Benjamin C, Davies Joshua A, Sullivan Philip A, Liao Yi, Dalton Larry R
Department of Electrical Engineering, University of Washington, Seattle, Washington 98195, USA.
Opt Express. 2008 Apr 28;16(9):6592-9. doi: 10.1364/oe.16.006592.
Electro-optic polymer waveguides in electron beam sensitive polymethyl methacrylate (PMMA) polymer matrix doped with organic nonlinear chromophores could be directly patterned by electron beam exposure with high resolution and smoothness. The polymer in the exposed regions was removed with standard electron beam resist developer and without damaging the chromophore containing polymer waveguides. Feature sizes on the order of 100 nm could be clearly resolved. High quality microring resonators made of YL124/PMMA electro-optic polymer were successfully fabricated with this technique. The measured resonance extinction ratios were more than 16 dB and quality factors were in the range of 10(3) approximately 10(4).
掺杂有机非线性发色团的电子束敏感聚甲基丙烯酸甲酯（PMMA）聚合物基质中的电光聚合物波导可通过电子束曝光直接进行高分辨率和平滑度的图案化。用标准电子束抗蚀剂显影剂去除曝光区域的聚合物，且不会损坏含发色团的聚合物波导。100纳米左右的特征尺寸能够清晰分辨。利用该技术成功制备了由YL124/PMMA电光聚合物制成的高质量微环谐振器。测得的谐振消光比超过16分贝，品质因数在10³至10⁴范围内。
