Atomic layer deposition: an overview.
作者信息
George Steven M
机构信息
Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309, USA.
出版信息
Chem Rev. 2010 Jan;110(1):111-31. doi: 10.1021/cr900056b.
PMID:19947596
Abstract
摘要
George Steven M
Department of Chemistry and Biochemistry, University of Colorado, Boulder, Colorado 80309, USA.
Chem Rev. 2010 Jan;110(1):111-31. doi: 10.1021/cr900056b.
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