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用于表面斜率测量的诺马斯基微分干涉对比显微镜:技术研究

Nomarski differential interference contrast microscopy for surface slope measurements: an examination of techniques.

作者信息

Hartman J S, Gordon R L, Lessor D L

出版信息

Appl Opt. 1981 Aug 1;20(15):2665-9. doi: 10.1364/AO.20.002665.

DOI:10.1364/AO.20.002665
PMID:20333015
Abstract

Alternate measurement and data analysis procedures are discussed and compared for the application of reflective Nomarski differential interference contrast microscopy for the determination of surface slopes. The discussion includes the interpretation of a previously reported iterative procedure using the results of a detailed optical model and the presentation of a new procedure based on measured image intensity extrema. Surface slope determinations from these procedures are presented and compared with results from a previously reported curve fit analysis of image intensity data. The accuracy and advantages of the different procedures are discussed.

摘要

针对反射式诺马斯基微分干涉对比显微镜在表面斜率测定中的应用,讨论并比较了交替测量和数据分析程序。讨论内容包括使用详细光学模型的结果对先前报道的迭代程序进行解释,以及基于测量图像强度极值提出一种新程序。展示了通过这些程序测定的表面斜率,并与先前报道的图像强度数据曲线拟合分析结果进行比较。讨论了不同程序的准确性和优势。

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