Kihara T, Yokomori K
Appl Opt. 1992 Aug 1;31(22):4482-7. doi: 10.1364/AO.31.004482.
We have developed an innovation of the polarized reflectances measurement technique for thickness and index (PRETTI) method, PRETTI-S, which is a simple and accurate technique to obtain the refractive index n and thickness d of a thin film by using S-polarized and P-polarized reflectances measured at oblique angles of incidence. In the PRETTI-S method, the n and d are determined by using only S-polarized reflectances. Therefore, the measurement and numerical procedure to extract the n and d are simpler than the conventional PRETTI method. As an example, measurement of a single-layer film (SiO(2)/Si) is carried out and excellent confirmation is obtained.
我们开发了一种用于厚度和折射率测量的偏振反射率测量技术的创新方法——PRETTI-S。这是一种简单且准确的技术，通过使用在斜入射角下测量的S偏振和P偏振反射率来获取薄膜的折射率n和厚度d。在PRETTI-S方法中，n和d仅通过S偏振反射率来确定。因此，提取n和d的测量和数值过程比传统的PRETTI方法更简单。例如，对单层膜（SiO(2)/Si）进行了测量，并获得了良好的验证结果。
