Simultaneous measurement of the refractive index and thickness of thin films by S-polarized reflectances.

We have developed an innovation of the polarized reflectances measurement technique for thickness and index (PRETTI) method, PRETTI-S, which is a simple and accurate technique to obtain the refractive index n and thickness d of a thin film by using S-polarized and P-polarized reflectances measured at oblique angles of incidence. In the PRETTI-S method, the n and d are determined by using only S-polarized reflectances. Therefore, the measurement and numerical procedure to extract the n and d are simpler than the conventional PRETTI method. As an example, measurement of a single-layer film (SiO(2)/Si) is carried out and excellent confirmation is obtained.