用于投影X射线光刻的同步辐射源和聚光器。

Synchrotron radiation sources and condensers for projection x-ray lithography.

作者信息

Murphy J B, White D L, Macdowell A A, Wood Ii O R

出版信息

Appl Opt. 1993 Dec 1;32(34):6920-9. doi: 10.1364/AO.32.006920.

DOI:10.1364/AO.32.006920

PMID:20856546

Abstract

The design requirements for a compact electron storage ring that could be used as a soft-x-ray source for projection lithography are discussed. The design concepts of the x-ray optics that are required for collecting and conditioning the radiation in divergence, uniformity, and direction to illuminate the mask correctly and the particular x-ray projection camera used are discussed. Preliminary designs for an entire soft-x-ray projection lithography system that uses an electron storage ring as a soft-x-ray source are presented. It is shown that, by combining the existing technology of storage rings with large collection angle condensers, a powerful and reliable source of 130-A photons for production line projection x-ray lithography is possible.

摘要

讨论了一种可作为投影光刻软X射线源的紧凑型电子储存环的设计要求。讨论了为正确照明掩模而在发散度、均匀性和方向上收集和调节辐射所需的X射线光学器件的设计概念，以及所使用的特定X射线投影相机。给出了一个使用电子储存环作为软X射线源的完整软X射线投影光刻系统的初步设计。结果表明，通过将现有的储存环技术与大收集角聚光器相结合，有可能为生产线投影X射线光刻提供一个强大而可靠的130埃光子源。