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用于纳米尺度材料与系统分析的光谱椭偏仪和偏振仪：现状、潜力与展望

Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives.

作者信息

Losurdo Maria, Bergmair Michael, Bruno Giovanni, Cattelan Denis, Cobet Christoph, de Martino Antonello, Fleischer Karsten, Dohcevic-Mitrovic Zorana, Esser Norbert, Galliet Melanie, Gajic Rados, Hemzal Dušan, Hingerl Kurt, Humlicek Josef, Ossikovski Razvigor, Popovic Zoran V, Saxl Ottilia

出版信息

J Nanopart Res. 2009 Oct;11(7):1521-1554. doi: 10.1007/s11051-009-9662-6. Epub 2009 Jun 12.

DOI:10.1007/s11051-009-9662-6
PMID:21170135
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC2988221/
Abstract

This paper discusses the fundamentals, applications, potential, limitations, and future perspectives of polarized light reflection techniques for the characterization of materials and related systems and devices at the nanoscale. These techniques include spectroscopic ellipsometry, polarimetry, and reflectance anisotropy. We give an overview of the various ellipsometry strategies for the measurement and analysis of nanometric films, metal nanoparticles and nanowires, semiconductor nanocrystals, and submicron periodic structures. We show that ellipsometry is capable of more than the determination of thickness and optical properties, and it can be exploited to gain information about process control, geometry factors, anisotropy, defects, and quantum confinement effects of nanostructures.

摘要

本文讨论了用于纳米尺度材料及相关系统和器件表征的偏振光反射技术的基本原理、应用、潜力、局限性和未来展望。这些技术包括光谱椭偏仪、旋光测量法和反射率各向异性。我们概述了用于测量和分析纳米薄膜、金属纳米颗粒和纳米线、半导体纳米晶体以及亚微米周期结构的各种椭偏测量策略。我们表明，椭偏仪不仅能够确定厚度和光学性质，还可用于获取有关工艺控制、几何因子、各向异性、缺陷以及纳米结构量子限制效应的信息。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/537a/2988221/92552c7a836c/11051_2009_9662_Fig24_HTML.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/537a/2988221/b46d76d9e3a2/11051_2009_9662_Fig12_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/537a/2988221/3e5e5ef02b74/11051_2009_9662_Fig13_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/537a/2988221/dc8e9cd066c3/11051_2009_9662_Fig14_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/537a/2988221/095d6f7318c9/11051_2009_9662_Fig15_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/537a/2988221/fb29d9b1fb4e/11051_2009_9662_Fig16_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/537a/2988221/8be2ef59e036/11051_2009_9662_Fig17_HTML.jpg
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