用于基于SU8的微机电系统（MEMS）和微光机电系统（MOEMS）构建的优化过的食人鱼蚀刻工艺。
Optimized piranha etching process for SU8-based MEMS and MOEMS construction.
作者信息
Holmes Matthew, Keeley Jared, Hurd Katherine, Schmidt Holger, Hawkins Aaron
机构信息
ECE Department, Brigham Young University, 459 Clyde Building, Provo, UT 84602, USA.
出版信息
J Micromech Microeng. 2010 Nov 1;20(11):1-8. doi: 10.1088/0960-1317/20/11/115008.
Abstract
We demonstrate the optimization of the concentration, temperature and cycling of a piranha (H(2)O(2):H(2)SO(4)) mixture that produces high yields while quickly etching hollow structures made using a highly crosslinked SU8 polymer sacrificial core. The effects of the piranha mixture on the thickness, refractive index and roughness of common micro-electromechanical systems and micro-opto-electromechanical systems fabrication materials (SiN, SiO(2) and Si) were determined. The effectiveness of the optimal piranha mixture was demonstrated in the construction of hollow anti-resonant reflecting optical waveguides.
摘要
我们展示了对食人鱼溶液（H₂O₂：H₂SO₄）的浓度、温度和循环次数进行优化的过程，该溶液能在快速蚀刻使用高度交联的SU8聚合物牺牲芯制成的中空结构时产生高产量。确定了食人鱼溶液对常见微机电系统和微光机电系统制造材料（SiN、SiO₂和Si）的厚度、折射率和粗糙度的影响。在中空抗谐振反射光波导的构建中证明了最佳食人鱼溶液的有效性。
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