Department of Mechanical Engineering, Stevens Institute of Technology, Castle Point on Hudson, Hoboken, New Jersey 07030, USA.
Opt Lett. 2011 May 1;36(9):1593-5. doi: 10.1364/OL.36.001593.
In this study, we have developed a tunable Lloyd-mirror interferometer with two degrees of freedom, in contrast to a traditional system with one degree of freedom. This new Lloyd-mirror interferometer allows an angular rotation of the mirror independently from that of a sample stage, resulting in an increased pattern coverage area with tunable pattern periodicity. Both theoretical and experimental results verify that the tunable characteristic of the modified configuration enhances the nanopatterning capabilities of the Lloyd-mirror interference lithography system especially in achieving greater pattern coverage area for larger pattern periodicities.
在这项研究中，我们开发了一种具有两个自由度的可调谐 Lloyd 镜干涉仪，与传统的单自由度系统相比。这种新型 Lloyd 镜干涉仪允许镜子的角度旋转与样品台的角度旋转独立，从而可以增加图案覆盖区域并实现可调谐的图案周期性。理论和实验结果都验证了这种改进配置的可调谐特性增强了 Lloyd 镜干涉光刻系统的纳米图案化能力，特别是在实现更大图案周期性的更大图案覆盖区域方面。
