金属微机电振荡器展现超高水汽分辨率。

Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution.

机构信息

Department of Physics, Universitat de les Illes Balears, Palma (Illes Balears), 07122, Spain.

出版信息

Lab Chip. 2011 Aug 21;11(16):2670-2. doi: 10.1039/c1lc20103d. Epub 2011 Jul 11.

DOI:10.1039/c1lc20103d

Abstract

Water vapor sensing characterization of a metal resonator fabricated with an industrial 0.35 μm CMOS technology is reported. The resonator frequency is ∼13.2 MHz and exhibits a sensitivity magnitude of ∼3.5 kHz per %RH without requiring any additional hygroscopic coating layer. An on-chip integrated oscillator circuit enables an unprecedented resolution of 0.005 %RH.

摘要

本文报道了采用工业 0.35 μm CMOS 技术制造的金属谐振器的水汽传感特性。该谐振器的频率约为 13.2 MHz，在不使用任何额外的吸湿涂层的情况下，其灵敏度幅度约为每 %RH 3.5 kHz。片上集成的振荡器电路实现了前所未有的 0.005 %RH 分辨率。