Allen T W, Silverstone J, Ponnampalam N, Olsen T, Meldrum A, DeCorby R G
ECE Department, University of Alberta, 2nd Floor, 9107-116 St. NW, Edmonton, AB, T6G 2V4, Canada.
Opt Express. 2011 Sep 26;19(20):18903-9. doi: 10.1364/OE.19.018903.
Arrays of half-symmetric Fabry-Perot micro-cavities were fabricated by controlled formation of circular delamination buckles within a-Si/SiO(2) multilayers. Cavity height scales approximately linearly with diameter, in reasonable agreement with predictions based on elastic buckling theory. The measured finesse (F > 10(3)) and quality factors (Q > 10(4) in the 1550 nm range) are close to reflectance limited predictions, indicating that the cavities have low roughness and few defects. Degenerate Hermite-Gaussian and Laguerre-Gaussian modes were observed, suggesting a high degree of cylindrical symmetry. Given their silicon-based fabrication, these cavities hold promise as building blocks for integrated optical sensing systems.
通过在非晶硅/二氧化硅多层膜中可控地形成圆形分层褶皱，制备了半对称法布里-珀罗微腔阵列。腔高与直径大致呈线性比例关系，这与基于弹性屈曲理论的预测相当吻合。测得的精细度（F > 10³）和品质因数（在1550纳米范围内Q > 10⁴）接近反射率限制的预测值，表明这些微腔粗糙度低且缺陷少。观察到了简并厄米-高斯和拉盖尔-高斯模式，这表明具有高度的圆柱对称性。鉴于其基于硅的制造工艺，这些微腔有望成为集成光学传感系统的构建模块。
