State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an, Shaanxi 710049, China.
Sensors (Basel). 2012;12(4):4051-64. doi: 10.3390/s120404051. Epub 2012 Mar 27.
An integrated multifunction micro-sensor for three-dimensional micro-force precision measurement under different pressure and temperature conditions is introduced in this paper. The integrated sensor consists of three kinds of sensors: a three-dimensional micro-force sensor, an absolute pressure sensor and a temperature sensor. The integrated multifunction micro-sensor is fabricated on silicon wafers by micromachining technology. Different doping doses of boron ion, placement and structure of resistors are tested for the force sensor, pressure sensor and temperature sensor to minimize the cross interference and optimize the properties. A glass optical fiber, with a ladder structure and sharp tip etched by buffer oxide etch solution, is glued on the micro-force sensor chip as the tactile probe. Experimental results show that the minimum force that can be detected by the force sensor is 300 nN; the lateral sensitivity of the force sensor is 0.4582 mV/μN; the probe length is linearly proportional to sensitivity of the micro-force sensor in lateral; the sensitivity of the pressure sensor is 0.11 mv/KPa; the sensitivity of the temperature sensor is 5.836 × 10(-3) KΩ/°C. Thus it is a cost-effective method to fabricate integrated multifunction micro-sensors with different measurement ranges that could be used in many fields.
本文介绍了一种用于不同压力和温度条件下三维微力精密测量的集成多功能微传感器。该集成传感器由三种传感器组成：三维微力传感器、绝对压力传感器和温度传感器。集成多功能微传感器通过微机械加工技术在硅片上制造。对力传感器、压力传感器和温度传感器进行了不同的硼离子掺杂剂量、电阻器的位置和结构的测试，以最小化交叉干扰并优化性能。一个带有梯级结构和用缓冲氧化物刻蚀溶液蚀刻的尖锐尖端的玻璃光纤，被胶合在微力传感器芯片上作为触觉探头。实验结果表明，力传感器可检测到的最小力为 300 nN；力传感器的横向灵敏度为 0.4582 mV/μN；探针长度与微力传感器的横向灵敏度呈线性比例关系；压力传感器的灵敏度为 0.11 mv/KPa；温度传感器的灵敏度为 5.836×10(-3) KΩ/°C。因此，用不同的测量范围制造集成多功能微传感器是一种具有成本效益的方法，可用于许多领域。
