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研究不同衬底和原子层沉积法制备的 ZnO 超薄种子层对 ZnO 纳米线阵列生长的影响。

Investigations into the impact of various substrates and ZnO ultra thin seed layers prepared by atomic layer deposition on growth of ZnO nanowire array.

机构信息

Center for Low-Dimensional Materials, Micro-Nano Devices and System, Changzhou University, Changzhou, 213164, China.

出版信息

Nanoscale Res Lett. 2012 Jul 3;7(1):368. doi: 10.1186/1556-276X-7-368.

DOI:10.1186/1556-276X-7-368
PMID:22759838
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3496633/
Abstract

The impact of various substrates and zinc oxide (ZnO) ultra thin seed layers prepared by atomic layer deposition on the geometric morphology of subsequent ZnO nanowire arrays (NWs) fabricated by the hydrothermal method was investigated. The investigated substrates included B-doped ZnO films, indium tin oxide films, single crystal silicon (111), and glass sheets. Scanning electron microscopy and X-ray diffraction measurements revealed that the geometry and aligment of the NWs were controlled by surface topography of the substrates and thickness of the ZnO seed layers, respectively. According to atomic force microscopy data, we suggest that the substrate, fluctuate amplitude and fluctuate frequency of roughness on ZnO seed layers have a great impact on the alignment of the resulting NWs, whereas the influence of the seed layers' texture was negligible.

摘要

研究了通过原子层沉积法制备的不同衬底和氧化锌 (ZnO) 超薄种子层对随后通过水热法制备的 ZnO 纳米线阵列 (NWs) 的几何形态的影响。研究的衬底包括掺硼 ZnO 薄膜、氧化铟锡薄膜、单晶硅 (111) 和玻璃片。扫描电子显微镜和 X 射线衍射测量表明,NWs 的几何形状和排列分别由衬底的表面形貌和 ZnO 种子层的厚度控制。根据原子力显微镜数据,我们认为衬底、ZnO 种子层上粗糙度的波动幅度和波动频率对所得 NWs 的排列有很大影响,而种子层的纹理的影响可以忽略不计。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2be6/3496633/c2440fe33a8c/1556-276X-7-368-2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2be6/3496633/c2440fe33a8c/1556-276X-7-368-2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2be6/3496633/c2440fe33a8c/1556-276X-7-368-2.jpg

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General route to vertical ZnO nanowire arrays using textured ZnO seeds.
通过氧化锌纳米线对钇铝石榴石:铈涂层进行纳米结构化:提高光提取效率的巧妙方法。
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Nano Lett. 2005 Jul;5(7):1231-6. doi: 10.1021/nl050788p.
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Nanowire dye-sensitized solar cells.纳米线染料敏化太阳能电池。
Nat Mater. 2005 Jun;4(6):455-9. doi: 10.1038/nmat1387. Epub 2005 May 15.
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Room-temperature ultraviolet nanowire nanolasers.室温紫外纳米线纳米激光器。
Science. 2001 Jun 8;292(5523):1897-9. doi: 10.1126/science.1060367.