Transducers Science and Technology Group, MESA+ Institute for Nanotechnology, University of Twente, P. O. Box 217, 7500 AE Enschede, The Netherlands.
Small. 2012 Dec 21;8(24):3823-31. doi: 10.1002/smll.201201446. Epub 2012 Aug 21.
A reproducible wafer-scale method to obtain 3D nanostructures is investigated. This method, called corner lithography, explores the conformal deposition and the subsequent timed isotropic etching of a thin film in a 3D shaped silicon template. The technique leaves a residue of the thin film in sharp concave corners which can be used as structural material or as an inversion mask in subsequent steps. The potential of corner lithography is studied by fabrication of functional 3D microfluidic components, in particular i) novel tips containing nano-apertures at or near the apex for AFM-based liquid deposition devices, and ii) a novel particle or cell trapping device using an array of nanowire frames. The use of these arrays of nanowire cages for capturing single primary bovine chondrocytes by a droplet seeding method is successfully demonstrated, and changes in phenotype are observed over time, while retaining them in a well-defined pattern and 3D microenvironment in a flat array.
研究了一种可重现的晶圆级获得 3D 纳米结构的方法。该方法称为角光刻，探索了在 3D 形状的硅模板中进行薄膜的保形沉积和随后的定时各向同性蚀刻。该技术在尖锐的凹角处留下薄膜的残留物，这些残留物可用作结构材料或后续步骤中的反转掩模。通过制造功能 3D 微流控组件来研究角光刻的潜力，特别是 i）在尖端或附近包含纳米孔的新型尖端，用于基于 AFM 的液体沉积装置，以及 ii）使用纳米线框架阵列的新型颗粒或细胞捕获装置。成功地演示了使用这些纳米线笼阵列通过液滴播种方法捕获单个原代牛软骨细胞，并且随着时间的推移观察到表型的变化，同时将它们保留在平板阵列中定义明确的模式和 3D 微环境中。
