Wang Jie, Wang Huan, Lai Liyan, Li Yigui
College of Science, Shanghai Institute of Technology, Shanghai 201418, China.
Micromachines (Basel). 2020 Dec 28;12(1):23. doi: 10.3390/mi12010023.
As a transdermal drug delivery technology, microneedle array (MNA) has the characteristics of painless, minimally invasive, and precise dosage. This work discusses and compares the new MNA mold prepared by our group using MEMS technology. First, we introduced the planar pattern-to-cross-section technology (PCT) method using LIGA (Photolithography, Galvanogormung, Abformung) technology to obtain a three-dimensional structure similar to an X-ray mask pattern. On this basis, combined with polydimethylsiloxane (PDMS) transfer technology and electroplating process, metal MNA can be prepared. The second method is to use silicon wet etching combined with the SU-8 process to obtain a PDMS quadrangular pyramid MNA using PDMS transfer technology. Third method is to use the tilting rotary lithography process to obtain PDMS conical MNA on SU-8 photoresist through PDMS transfer technology. All three processes utilize parallel subtractive manufacturing methods, and the error range of reproducibility and accuracy is 2-11%. LIGA technology produces hollow MNA with an aspect ratio of up to 30, which is used for blood extraction and drug injection. The height of the MNA prepared by the engraving process is about 600 μm, which can achieve a sustained release effect together with a potential systemic delivery. The height of the MNA prepared by the ultraviolet exposure process is about 150 μm, which is used to stimulate the subcutaneous tissue.
作为一种经皮给药技术，微针阵列（MNA）具有无痛、微创和剂量精确的特点。本文讨论并比较了本课题组采用微机电系统（MEMS）技术制备的新型MNA模具。首先，我们介绍了利用LIGA（光刻、电铸、注塑）技术的平面图案到横截面技术（PCT）方法，以获得类似于X射线掩模图案的三维结构。在此基础上，结合聚二甲基硅氧烷（PDMS）转移技术和电镀工艺，可以制备金属MNA。第二种方法是采用硅湿法蚀刻结合SU-8工艺，通过PDMS转移技术获得PDMS四角锥MNA。第三种方法是采用倾斜旋转光刻工艺，通过PDMS转移技术在SU-8光刻胶上获得PDMS锥形MNA。这三种工艺均采用并行减法制造方法，再现性和精度的误差范围为2-11%。LIGA技术生产的中空MNA的纵横比高达30，用于采血和药物注射。通过雕刻工艺制备的MNA高度约为600μm，可与潜在的全身给药一起实现缓释效果。通过紫外线曝光工艺制备的MNA高度约为150μm，用于刺激皮下组织。
