Institut für Theoretische Physik, Goethe-Universität, Max-von-Laue-Straße 1, 60438 Frankfurt am Main, Germany.
Beilstein J Nanotechnol. 2012;3:546-55. doi: 10.3762/bjnano.3.63. Epub 2012 Jul 25.
We present experimental results and theoretical simulations of the adsorption behavior of the metal-organic precursor Co(2)(CO)(8) on SiO(2) surfaces after application of two different pretreatment steps, namely by air plasma cleaning or a focused electron beam pre-irradiation. We observe a spontaneous dissociation of the precursor molecules as well as autodeposition of cobalt on the pretreated SiO(2) surfaces. We also find that the differences in metal content and relative stability of these deposits depend on the pretreatment conditions of the substrate. Transport measurements of these deposits are also presented. We are led to assume that the degree of passivation of the SiO(2) surface by hydroxyl groups is an important controlling factor in the dissociation process. Our calculations of various slab settings, using dispersion-corrected density functional theory, support this assumption. We observe physisorption of the precursor molecule on a fully hydroxylated SiO(2) surface (untreated surface) and chemisorption on a partially hydroxylated SiO(2) surface (pretreated surface) with a spontaneous dissociation of the precursor molecule. In view of these calculations, we discuss the origin of this dissociation and the subsequent autocatalysis.
我们展示了金属有机前体 Co(2)(CO)(8) 在经过两种不同预处理步骤(即空气等离子体清洗或聚焦电子束预辐照)后在 SiO(2) 表面上的吸附行为的实验结果和理论模拟。我们观察到前体分子的自发解离以及钴在预处理的 SiO(2) 表面上的自动沉积。我们还发现,这些沉积物的金属含量和相对稳定性的差异取决于基底的预处理条件。我们还介绍了这些沉积物的输运测量结果。我们假设 SiO(2) 表面的羟基的钝化程度是解离过程中的一个重要控制因素。我们使用色散校正的密度泛函理论对各种薄片设置的计算支持了这一假设。我们观察到前体分子在完全羟基化的 SiO(2) 表面(未处理表面)上的物理吸附和在部分羟基化的 SiO(2) 表面(预处理表面)上的化学吸附,前体分子自发解离。鉴于这些计算,我们讨论了这种解离的起源以及随后的自动催化作用。