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具有钪接触的高性能多层 MoS2 晶体管。

High performance multilayer MoS2 transistors with scandium contacts.

机构信息

Birck Nanotechnology Center & Department of ECE, Purdue University, West Lafayette, Indiana, USA.

出版信息

Nano Lett. 2013 Jan 9;13(1):100-5. doi: 10.1021/nl303583v. Epub 2012 Dec 19.

Abstract

While there has been growing interest in two-dimensional (2-D) crystals other than graphene, evaluating their potential usefulness for electronic applications is still in its infancy due to the lack of a complete picture of their performance potential. The focus of this article is on contacts. We demonstrate that through a proper understanding and design of source/drain contacts and the right choice of number of MoS(2) layers the excellent intrinsic properties of this 2-D material can be harvested. Using scandium contacts on 10-nm-thick exfoliated MoS(2) flakes that are covered by a 15 nm Al(2)O(3) film, high effective mobilities of 700 cm(2)/(V s) are achieved at room temperature. This breakthrough is largely attributed to the fact that we succeeded in eliminating contact resistance effects that limited the device performance in the past unrecognized. In fact, the apparent linear dependence of current on drain voltage had mislead researchers to believe that a truly Ohmic contact had already been achieved, a misconception that we also elucidate in the present article.

摘要

虽然人们对除石墨烯以外的二维(2-D)晶体越来越感兴趣,但由于缺乏对其性能潜力的全面了解,评估它们在电子应用中的潜在用途仍处于起步阶段。本文的重点是接触。我们通过对源/漏接触的正确理解和设计以及对 MoS2层数的正确选择,展示了如何利用这种二维材料的优异固有特性。在厚度为 10nm 的剥离 MoS2薄片上使用覆盖有 15nmAl2O3薄膜的钪接触,在室温下实现了 700cm2/(V s)的高有效迁移率。这一突破在很大程度上归因于我们成功消除了过去未被认识到的接触电阻效应,这些效应限制了器件性能。事实上,电流对漏极电压的明显线性关系误导了研究人员,使他们相信已经实现了真正的欧姆接触,我们在本文中也阐明了这一误解。

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