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用于逻辑应用的由纳米颗粒 SiO2 质子导体门控的自组装双面栅薄场效应晶体管。

Self-assembled dual in-plane gate thin-film transistors gated by nanogranular SiO2 proton conductors for logic applications.

机构信息

Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, People's Republic of China.

出版信息

Nanoscale. 2013 Mar 7;5(5):1980-5. doi: 10.1039/c3nr33734k. Epub 2013 Jan 30.

Abstract

Phosphorus (P)-doped nanogranular SiO(2) films are deposited by plasma-enhanced chemical vapor deposition at room temperature, and a high proton conductivity of ~5.6 × 10(-4) S cm(-1) is measured at room temperature with a relative humidity of 70%. The accumulation of protons at the SiO(2)/indium-zinc-oxide (IZO) interface induces a large electric-double-layer (EDL) capacitance. Thin-film transistors (TFTs) with two in-plane gates are self-assembled on transparent conducting glass substrates. The large EDL capacitance can effectively modulate the IZO channel with a current ON/OFF ratio of >10(7). Such TFTs calculate dual input signals at the gate level coupled with a floating gate, analogous to that of neuron MOS (vMOS). AND logic is demonstrated on the neuron TFTs. Such neuron TFTs gated by P-doped nanogranular SiO(2) shows an effective electrostatic modulation on conductivities of oxide semiconductors, which is meaningful for portable chemical-biological sensing applications.

摘要

通过等离子体增强化学气相沉积在室温下沉积掺磷纳米颗粒二氧化硅(SiO2)薄膜,在相对湿度为 70%的室温下测量到约 5.6×10-4 S cm-1 的高质子电导率。SiO2/氧化铟锌(IZO)界面处质子的积累诱导了大的双电层(EDL)电容。在透明导电玻璃衬底上自组装了带有两个平面栅极的薄膜晶体管(TFT)。大的 EDL 电容可以有效地调制 IZO 沟道,电流导通/关断比大于 107。这种 TFT 可以在栅极级与浮栅耦合的情况下计算双输入信号,类似于神经元 MOS(vMOS)。在神经元 TFT 上演示了与逻辑。由掺磷纳米颗粒 SiO2 栅控的神经元 TFT 对氧化物半导体的电导率表现出有效的静电调制,这对于便携式化学-生物传感应用具有重要意义。

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