Department of Electronics, University of Barcelona, Marti Franques, 1, 08028 Barcelona, Spain.
Sensors (Basel). 2013 May 30;13(6):7156-69. doi: 10.3390/s130607156.
Quartz Tuning Fork (QTF)-based Scanning Probe Microscopy (SPM) is an important field of research. A suitable model for the QTF is important to obtain quantitative measurements with these devices. Analytical models have the limitation of being based on the double cantilever configuration. In this paper, we present an electromechanical finite element model of the QTF electrically excited with two free prongs. The model goes beyond the state-of-the-art of numerical simulations currently found in the literature for this QTF configuration. We present the first numerical analysis of both the electrical and mechanical behavior of QTF devices. Experimental measurements obtained with 10 units of the same model of QTF validate the finite element model with a good agreement.
基于石英音叉（QTF）的扫描探针显微镜（SPM）是一个重要的研究领域。对于这些设备进行定量测量，建立 QTF 的合适模型非常重要。解析模型的局限性在于它们基于双悬臂梁配置。在本文中，我们提出了一种用两个自由叉激励的 QTF 的机电有限元模型。该模型超越了目前文献中该 QTF 配置的数值模拟的最新水平。我们首次对 QTF 器件的电气和机械行为进行了数值分析。用相同模型的 10 个 QTF 单元获得的实验测量结果与有限元模型吻合较好，验证了该模型。
