IEEE Trans Biomed Circuits Syst. 2007 Mar;1(1):3-18. doi: 10.1109/TBCAS.2007.893189.
We discuss the design, fabrication, and testing of a hybrid microsystem for stand-alone cell culture and incubation. The micro-incubator is engineered through the integration of a silicon CMOS die for the heater and temperature sensor, with multilayer silicone (PDMS) structures namely, fluidic channels and a 1.5-mm diameter 12-muL culture well. A 90-mum-thick PDMS membrane covers the top of the culture well, acting as barrier to contaminants while at the same time allowing the cells to breath and exchange gases with the ambient environment. The packaging for the microsystem includes a flexible polyimide electronic ribbon cable and four fluidic ports that provide external interfaces to electrical energy, closed-loop sensing and electronic control as well as solid and liquid supplies. The complete structure has a size of (2.5times2.5times0.6) cm(3). We have employed the device to successfully culture BHK-21 cells autonomously over a three day period in ambient environment.
我们讨论了一种用于独立细胞培养和孵育的混合微系统的设计、制造和测试。该微孵育器是通过将用于加热器和温度传感器的硅 CMOS 芯片与多层硅（PDMS）结构（即流体通道和 1.5 毫米直径的 12 微升培养孔）集成而设计的。一个 90 微米厚的 PDMS 膜覆盖在培养孔的顶部，作为阻挡污染物的屏障，同时允许细胞与周围环境进行气体交换。微系统的封装包括一个柔性聚酰亚胺电子带状电缆和四个流体端口，这些端口提供了与电能、闭环传感和电子控制以及固体和液体供应的外部接口。整个结构的尺寸为（2.5times2.5times0.6）cm(3)。我们已经成功地使用该设备在环境中自主培养 BHK-21 细胞三天。
