Department of Chemistry and International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA.
J Am Chem Soc. 2013 Aug 21;135(33):12196-9. doi: 10.1021/ja4061867. Epub 2013 Aug 8.
Anisotropic Au nanoparticles have been used to create a library of complex features on silicon surfaces. The technique provides control over feature size, shape, and depth. Moreover, a detailed study of the etching rate as a function of the nanoparticle surface facet interfaced with the silicon substrate suggested that the etching is highly dependent upon the facet surface energy. Specifically, the etching rate for Au nanocubes with {100}-terminated facets was ~1.5 times higher than that for triangular nanoprisms with {111} facets. Furthermore, this work gives fundamental insight into the mechanism of metal-catalyzed chemical etching.
各向异性的金纳米粒子被用来在硅表面上创建一系列复杂的特征。该技术可以控制特征的大小、形状和深度。此外，通过详细研究纳米粒子表面与硅衬底的界面处的刻蚀速率作为函数关系，表明刻蚀高度依赖于表面能。具体来说，具有 {100} 面终止的金纳米立方体的刻蚀速率比具有 {111} 面的三角棱柱形纳米棱镜的刻蚀速率高约 1.5 倍。此外，这项工作为金属催化化学刻蚀的机制提供了基本的见解。
