Department of Materials Science and Engineering, Yonsei University, Seoul 120-749, Republic of Korea.
Nanoscale Res Lett. 2014 Feb 3;9(1):56. doi: 10.1186/1556-276X-9-56.
The single living cell action potential was measured in an intracellular mode by using a vertical nanoelectrode. For intracellular interfacing, Si nanowires were vertically grown in a controlled manner, and optimum conditions, such as diameter, length, and nanowire density, were determined by culturing cells on the nanowires. Vertical nanowire probes were then fabricated with a complimentary metal-oxide-semiconductor (CMOS) process including sequential deposition of the passivation and electrode layers on the nanowires, and a subsequent partial etching process. The fabricated nanowire probes had an approximately 60-nm diameter and were intracellular. These probes interfaced with a GH3 cell and measured the spontaneous action potential. It successfully measured the action potential, which rapidly reached a steady state with average peak amplitude of approximately 10 mV, duration of approximately 140 ms, and period of 0.9 Hz.
采用垂直纳米电极以细胞内模式测量单个活细胞动作电位。为了实现细胞内接口，以受控方式垂直生长硅纳米线，并通过在纳米线上培养细胞来确定最佳条件，例如直径、长度和纳米线密度。然后，使用互补金属氧化物半导体（CMOS）工艺制造垂直纳米线探针，该工艺包括在纳米线上顺序沉积钝化层和电极层，以及随后的部分蚀刻工艺。所制造的纳米线探针的直径约为 60nm，且处于细胞内。这些探针与 GH3 细胞接口并测量自发动作电位。它成功地测量了动作电位，其平均峰值幅度约为 10mV，持续时间约为 140ms，频率为 0.9Hz，迅速达到稳定状态。
