Park Hyundai, Kim Sanggi, Park Jaegyu, Joo Jiho, Kim Gyungock
Opt Express. 2013 Dec 2;21(24):29313-9. doi: 10.1364/OE.21.029313.
This paper reports a fiber-to-chip coupler consisting of a silicon inverted taper and a silicon oxynitride (SiON) double stage taper, where the cascaded taper structure enables adiabatic mode transfer between a submicron silicon waveguide and a single mode fiber. The coupler, fabricated by a simplified process, demonstrates an average coupling loss of 3.6 and 4.2 dB for TM and TE polarizations, respectively, with a misalignment tolerance of ± 2.2 µm for 1 dB loss penalty.
本文报道了一种由硅倒置锥和氮氧化硅（SiON）双级锥组成的光纤到芯片耦合器，其中级联锥结构实现了亚微米硅波导和单模光纤之间的绝热模式转换。该耦合器采用简化工艺制造，对于TM和TE偏振，平均耦合损耗分别为3.6 dB和4.2 dB，对于1 dB损耗代价，其对准容差为±2.2 µm。
