具有纳米穹顶结构的荧光碳化硅中的宽带抗反射和光提取增强

Broadband antireflection and light extraction enhancement in fluorescent SiC with nanodome structures.

机构信息

DTU Fotonik, Technical University of Denmark, DK-2800 Lyngby, Denmark.

Department of Physics, Chemistry and Biology, Linköping University, SE-58183 Linköping, Sweden.

出版信息

Sci Rep. 2014 Apr 11;4:4662. doi: 10.1038/srep04662.

DOI:10.1038/srep04662

PMID:24722521

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3983593/

Abstract

We demonstrate a time-efficient and low-cost approach to fabricate Si3N4 coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si3N4 coating are formed via dry etching and thin film deposition process. By using this method, a significant broadband surface antireflection and a considerable omnidirectional luminescence enhancement are obtained. The experimental observations are then supported by numerical simulations. It is believed that our fabrication method will be well suitable for large-scale production in the future.

摘要

我们展示了一种高效且低成本的方法，用于在荧光碳化硅中制造氮化硅涂层纳米穹顶结构。纳米球光刻被用作纳米图案化方法，并且通过干法刻蚀和薄膜沉积工艺形成具有氮化硅涂层的碳化硅纳米穹顶结构。通过使用这种方法，获得了显著的宽带表面抗反射和相当大的全向发光增强。实验观察结果随后得到了数值模拟的支持。相信我们的制造方法将非常适合未来的大规模生产。