Chen Yu, Li Mo
Opt Lett. 2014 Jun 15;39(12):3449-52. doi: 10.1364/OL.39.003449.
Flexible integrated photonic devices based on crystalline materials on plastic substrates have a promising potential in many unconventional applications. In this Letter, we demonstrate a fully integrated photonic system including ring resonators and grating couplers, based on both crystalline silicon and silicon nitride, on flexible plastic substrate by using the stamping-transfer method. A high yield has been achieved by a simple, yet reliable transfer method without significant performance degradation.
基于塑料基板上晶体材料的柔性集成光子器件在许多非常规应用中具有广阔的潜力。在本信函中，我们通过压印转移法在柔性塑料基板上展示了一个完全集成的光子系统，该系统包括基于晶体硅和氮化硅的环形谐振器和光栅耦合器。通过一种简单而可靠的转移方法实现了高成品率，且性能无显著下降。
