通过三重热氧化和硅-玻璃阳极键合制造和表征亚 100/10nm 平面纳流道。
Fabrication and characterization of sub-100/10 nm planar nanofluidic channels by triple thermal oxidation and silicon-glass anodic bonding.
机构信息
Institute of Microelectronics, Peking University , Beijing 100871, People's Republic of China.
出版信息
Biomicrofluidics. 2014 Aug 25;8(5):052106. doi: 10.1063/1.4894160. eCollection 2014 Sep.
Abstract
We reported the fabrication and characterization of nanofluidic channels by Triple Thermal Oxidation and Silicon-Glass Anodic Bonding. Planar nanochannels with depths from sub-100 nm down to sub-10 nm were realized by this method. A theoretical model was developed to precisely predict the depth of nanochannels. The depth and uniformity of nanochannels showed good stability during anodic bonding. This method is promising for various nanofluidic studies, such as nanofluidic electrokinetics, biomolecule manipulation, and energy conversion.
摘要
我们报道了通过三重热氧化和硅-玻璃阳极键合来制造和表征纳流道。通过这种方法实现了深度从亚 100nm 到亚 10nm 的平面纳流道。我们还开发了一个理论模型来精确预测纳流道的深度。在阳极键合过程中，纳流道的深度和均匀性表现出良好的稳定性。这种方法在各种纳流道研究中具有广阔的应用前景，例如纳流道电动学、生物分子操纵和能量转换。
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2
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Biomicrofluidics. 2013 Mar;7(2):26501. doi: 10.1063/1.4794973. Epub 2013 Mar 13.
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5
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