Parra-Barranco Julián, García-García Francisco J, Rico Víctor, Borrás Ana, López-Santos Carmen, Frutos Fabián, Barranco Angel, González-Elipe Agustín R
†Nanotechnology on Surfaces Laboratory, Instituto de Ciencia de Materiales de Sevilla, Consejo Superior de Investigaciones Científicas (CSIC)-Universidad de Sevilla. c/Américo Vespucio 49, Sevilla 41092, Spain.
ACS Appl Mater Interfaces. 2015 May 27;7(20):10993-1001. doi: 10.1021/acsami.5b02197. Epub 2015 May 12.
ITO thin films have been prepared by electron beam evaporation at oblique angles (OA), directly and while assisting their growth with a downstream plasma. The films microstructure, characterized by scanning electron microscopy, atomic force microscopy, and glancing incidence small-angle X-ray scattering, consisted of tilted and separated nanostructures. In the plasma assisted films, the tilting angle decreased and the nanocolumns became associated in the form of bundles along the direction perpendicular to the flux of evaporated material. The annealed films presented different in-depth and sheet resistivity as confirmed by scanning conductivity measurements taken for the individual nanocolumns. In addition, for the plasma-assisted thin films, two different sheet resistance values were determined by measuring along the nanocolumn bundles or the perpendicular to it. This in-plane anisotropy induces the electrochemical deposition of elongated gold nanostructures. The obtained Au-ITO composite thin films were characterized by anisotropic plasmon resonance absorption and a dichroic behavior when examined with linearly polarized light.
通过电子束倾斜角蒸发法（OA）直接制备了ITO薄膜，并且在下游等离子体辅助其生长的情况下进行制备。通过扫描电子显微镜、原子力显微镜和掠入射小角X射线散射对薄膜微观结构进行表征，其由倾斜且分离的纳米结构组成。在等离子体辅助的薄膜中，倾斜角减小，纳米柱沿垂直于蒸发材料通量的方向以束状形式相互关联。通过对单个纳米柱进行扫描电导率测量证实，退火后的薄膜呈现出不同的深度和表面电阻率。此外，对于等离子体辅助的薄膜，通过沿纳米柱束或垂直于纳米柱束的方向进行测量，确定了两个不同的表面电阻值。这种面内各向异性引发了细长金纳米结构的电化学沉积。当用线偏振光检查时，所获得的金-ITO复合薄膜具有各向异性等离子体共振吸收和二向色性行为的特征。
