Chen Chao, Raghunathan Shreyas B, Yu Zili, Shabanimotlagh Maysam, Chen Zhao, Chang Zu-yao, Blaak Sandra, Prins Christian, Ponte Jacco, Noothout Emile, Vos Hendrik J, Bosch Johan G, Verweij Martin D, de Jong Nico, Pertijs Michiel A P
IEEE Trans Ultrason Ferroelectr Freq Control. 2016 Jan;63(1):47-59. doi: 10.1109/TUFFC.2015.2496580. Epub 2015 Oct 30.
This paper presents the design, fabrication, and experimental evaluation of a prototype lead zirconium titanate (PZT) matrix transducer with an integrated receive ASIC, as a proof of concept for a miniature three-dimensional (3-D) transesophageal echocardiography (TEE) probe. It consists of an array of 9 ×12 piezoelectric elements mounted on the ASIC via an integration scheme that involves direct electrical connections between a bond-pad array on the ASIC and the transducer elements. The ASIC addresses the critical challenge of reducing cable count, and includes front-end amplifiers with adjustable gains and micro-beamformer circuits that locally process and combine echo signals received by the elements of each 3 ×3 subarray. Thus, an order-of-magnitude reduction in the number of receive channels is achieved. Dedicated circuit techniques are employed to meet the strict space and power constraints of TEE probes. The ASIC has been fabricated in a standard 0.18-μm CMOS process and consumes only 0.44 mW/channel. The prototype has been acoustically characterized in a water tank. The ASIC allows the array to be presteered across ±37° while achieving an overall dynamic range of 77 dB. Both the measured characteristics of the individual transducer elements and the performance of the ASIC are in good agreement with expectations, demonstrating the effectiveness of the proposed techniques.
本文介绍了一种集成接收专用集成电路(ASIC)的钛酸铅锆(PZT)基矩阵换能器原型的设计、制造及实验评估,作为微型三维经食管超声心动图(TEE)探头概念验证。它由一个9×12的压电元件阵列组成,通过一种集成方案安装在ASIC上,该方案涉及ASIC上的焊盘阵列与换能器元件之间的直接电连接。该ASIC解决了减少电缆数量这一关键挑战,包括具有可调增益的前端放大器和微波束形成器电路,这些电路可对每个3×3子阵列的元件接收到的回波信号进行本地处理和组合。因此,接收通道数量减少了一个数量级。采用了专用电路技术来满足TEE探头严格的空间和功率限制。该ASIC采用标准的0.18μm CMOS工艺制造,每通道仅消耗0.44 mW。该原型已在水箱中进行了声学特性表征。该ASIC允许对阵列进行±37°的预扫描,同时实现77 dB的整体动态范围。单个换能器元件的测量特性和ASIC的性能均与预期良好吻合,证明了所提出技术的有效性。