Yang S M, Kim S R N, Youn W K, Kim C S, Kim D S, Yi K W, Hwang N M
J Nanosci Nanotechnol. 2015 Nov;15(11):8418-23. doi: 10.1166/jnn.2015.11458.
The generation of charged silver nanoparticles in the gas phase during thermal evaporation of silver at atmospheric pressure was confirmed by the nano-differential mobility analyzer (DMA). Effects of the evaporation temperature, the nitrogen gas flow rate and the amount of silver to be evaporated on the size distribution of charged nanoparticles (CNPs) were examined. Both positively and negatively-charged nanoparticles were generated under all processing conditions adopted in this study. The deposition behavior of CNPs was affected by the gas flow, which is affected by the temperature gradient in the reactor and by the applied electric bias. The electric bias, which not only enhanced the film growth rate but also produced a much denser film surface, turned out to be an important process parameter under the condition where an appreciable amount of CNPs is generated.
通过纳米微分迁移率分析仪（DMA）证实了在大气压下银热蒸发过程中气相中带电银纳米颗粒的生成。研究了蒸发温度、氮气流量和银蒸发量对带电纳米颗粒（CNPs）尺寸分布的影响。在本研究采用的所有加工条件下，均产生了带正电和带负电的纳米颗粒。CNPs的沉积行为受气流影响，而气流又受反应器中的温度梯度和施加的电偏压影响。结果表明，电偏压不仅提高了薄膜生长速率，还使薄膜表面更加致密，在产生大量CNPs的条件下，电偏压是一个重要的工艺参数。
