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有序硅纳米柱可扩展阵列上精确控制的锗纳米结构的演化与工程

Evolution and Engineering of Precisely Controlled Ge Nanostructures on Scalable Array of Ordered Si Nano-pillars.

作者信息

Wang Shuguang, Zhou Tong, Li Dehui, Zhong Zhenyang

机构信息

State Key Laboratory of Surface Physics and Department of Physics, Collaborative Innovation Center of Advanced Microstructures, Fudan University, Shanghai 200433, China.

School of Science, Shandong University of Technology, Zibo 255049, China.

出版信息

Sci Rep. 2016 Jun 29;6:28872. doi: 10.1038/srep28872.

Abstract

The scalable array of ordered nano-pillars with precisely controllable quantum nanostructures (QNs) are ideal candidates for the exploration of the fundamental features of cavity quantum electrodynamics. It also has a great potential in the applications of innovative nano-optoelectronic devices for the future quantum communication and integrated photon circuits. Here, we present a synthesis of such hybrid system in combination of the nanosphere lithography and the self-assembly during heteroepitaxy. The precise positioning and controllable evolution of self-assembled Ge QNs, including quantum dot necklace(QDN), QD molecule(QDM) and quantum ring(QR), on Si nano-pillars are readily achieved. Considering the strain relaxation and the non-uniform Ge growth due to the thickness-dependent and anisotropic surface diffusion of adatoms on the pillars, the comprehensive scenario of the Ge growth on Si pillars is discovered. It clarifies the inherent mechanism underlying the controllable growth of the QNs on the pillar. Moreover, it inspires a deliberate two-step growth procedure to engineer the controllable QNs on the pillar. Our results pave a promising avenue to the achievement of desired nano-pillar-QNs system that facilitates the strong light-matter interaction due to both spectra and spatial coupling between the QNs and the cavity modes of a single pillar and the periodic pillars.

摘要

具有精确可控量子纳米结构(QNs)的可扩展有序纳米柱阵列是探索腔量子电动力学基本特性的理想候选者。它在未来量子通信和集成光子电路的创新纳米光电器件应用中也具有巨大潜力。在此,我们展示了一种结合纳米球光刻和异质外延过程中的自组装来合成这种混合系统的方法。在硅纳米柱上自组装的锗量子纳米结构,包括量子点项链(QDN)、量子点分子(QDM)和量子环(QR)的精确定位和可控演化很容易实现。考虑到由于柱上吸附原子的厚度依赖性和各向异性表面扩散导致的应变弛豫和锗生长的不均匀性,发现了锗在硅柱上生长的综合情况。这阐明了柱上量子纳米结构可控生长的内在机制。此外,它启发了一种精心设计的两步生长程序来设计柱上可控的量子纳米结构。我们的结果为实现所需的纳米柱 - 量子纳米结构系统铺平了一条有前途的道路,该系统由于量子纳米结构与单个柱和周期性柱的腔模之间的光谱和空间耦合而促进强光 - 物质相互作用。

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