Liu Anhan, Zhang Xiaowei, Liu Ziyu, Li Yuning, Peng Xueyang, Li Xin, Qin Yue, Hu Chen, Qiu Yanqing, Jiang Han, Wang Yang, Li Yifan, Tang Jun, Liu Jun, Guo Hao, Deng Tao, Peng Songang, Tian He, Ren Tian-Ling
School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing, 100049, People's Republic of China.
School of Microelectronics, Fudan University, Shanghai, 200433, People's Republic of China.
Nanomicro Lett. 2024 Feb 16;16(1):119. doi: 10.1007/s40820-023-01273-5.
Due to the constraints imposed by physical effects and performance degradation, silicon-based chip technology is facing certain limitations in sustaining the advancement of Moore's law. Two-dimensional (2D) materials have emerged as highly promising candidates for the post-Moore era, offering significant potential in domains such as integrated circuits and next-generation computing. Here, in this review, the progress of 2D semiconductors in process engineering and various electronic applications are summarized. A careful introduction of material synthesis, transistor engineering focused on device configuration, dielectric engineering, contact engineering, and material integration are given first. Then 2D transistors for certain electronic applications including digital and analog circuits, heterogeneous integration chips, and sensing circuits are discussed. Moreover, several promising applications (artificial intelligence chips and quantum chips) based on specific mechanism devices are introduced. Finally, the challenges for 2D materials encountered in achieving circuit-level or system-level applications are analyzed, and potential development pathways or roadmaps are further speculated and outlooked.
由于受到物理效应和性能退化的限制,硅基芯片技术在维持摩尔定律的发展方面面临一定的局限性。二维(2D)材料已成为后摩尔时代极具潜力的候选材料,在集成电路和下一代计算等领域具有巨大潜力。在此综述中,总结了二维半导体在工艺工程和各种电子应用方面的进展。首先详细介绍了材料合成、专注于器件配置的晶体管工程、介电工程、接触工程和材料集成。然后讨论了用于某些电子应用的二维晶体管,包括数字和模拟电路、异构集成芯片和传感电路。此外,还介绍了基于特定机制器件的几种有前景的应用(人工智能芯片和量子芯片)。最后,分析了二维材料在实现电路级或系统级应用中遇到的挑战,并进一步推测和展望了潜在的发展途径或路线图。