Ding Jie, He Chang, Ma Hongliang, Zhang Wendong, Fan Xuge
School of Integrated Circuits and Electronics, Beijing Institute of Technology, 100081, Beijing, China.
School of Interdisciplinary Science, Beijing Institute of Technology, 100081, Beijing, China.
Microsyst Nanoeng. 2025 May 28;11(1):111. doi: 10.1038/s41378-025-00969-5.
Atomically thin suspended graphene can be used as NEMS transducers for ultra-small and high-performance sensors due to its excellent mechanical and electrical properties. Most applications of suspended graphene in NEMS devices are limited to pressure sensors, resonators, switches, etc. Graphene-based NEMS accelerometers have rarely been reported, with limitations such as mechanical robustness, life span and device yield, thereby limiting their practical applications. Here, we reported piezoresistive graphene-based NEMS accelerometers with high manufacturing yield, excellent mechanical robustness and stability, and long life span, in which the width of trenches for suspending graphene membranes was only 1 µm and fully-clamped suspended double-layer graphene membranes with an attached SiO/Si proof mass was used as acceleration transducer. The impact of geometrical sizes of the proof mass attached to the suspended graphene membranes on the output signal of devices has been studied. These findings would contribute to rapid developments and practical applications of ultra-small and high-performance graphene-based NEMS accelerometers and related devices.
由于其优异的机械和电学性能，原子级薄的悬浮石墨烯可作为超小型高性能传感器的纳米机电系统（NEMS）换能器。悬浮石墨烯在NEMS器件中的大多数应用仅限于压力传感器、谐振器、开关等。基于石墨烯的NEMS加速度计鲜有报道，存在机械鲁棒性、寿命和器件成品率等限制，从而限制了它们的实际应用。在此，我们报道了具有高制造成品率、优异机械鲁棒性和稳定性以及长寿命的压阻式基于石墨烯的NEMS加速度计，其中用于悬浮石墨烯膜的沟槽宽度仅为1μm，并且使用附着有SiO/Si质量块的完全夹持的悬浮双层石墨烯膜作为加速度换能器。研究了附着在悬浮石墨烯膜上的质量块的几何尺寸对器件输出信号的影响。这些发现将有助于超小型高性能基于石墨烯的NEMS加速度计及相关器件的快速发展和实际应用。
