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晶圆级的石墨烯薄膜的合成与转移。

Wafer-scale synthesis and transfer of graphene films.

机构信息

SKKU Advanced Institute of Nanotechnology (SAINT) and Center for Human Interface Nano Technology (HINT), Sungkyunkwan University,Suwon 440-746, Korea.

出版信息

Nano Lett. 2010 Feb 10;10(2):490-3. doi: 10.1021/nl903272n.

Abstract

We developed means to produce wafer scale, high-quality graphene films as large as 3 in. wafer size on Ni and Cu films under ambient pressure and transfer them onto arbitrary substrates through instantaneous etching of metal layers. We also demonstrated the applications of the large-area graphene films for the batch fabrication of field-effect transistor (FET) arrays and stretchable strain gauges showing extraordinary performances. Transistors showed the hole and electron mobilities of the device of 1100 +/- 70 and 550 +/- 50 cm(2)/(V s) at drain bias of -0.75 V, respectively. The piezo-resistance gauge factor of strain sensor was approximately 6.1. These methods represent a significant step toward the realization of graphene devices in wafer scale as well as application in optoelectronics, flexible and stretchable electronics.

摘要

我们开发了在常压下在镍和铜薄膜上制造晶圆级高质量石墨烯薄膜的方法,其尺寸可达 3 英寸晶圆大小,并通过瞬间蚀刻金属层将其转移到任意衬底上。我们还展示了大面积石墨烯薄膜在批量制造场效应晶体管 (FET) 阵列和可拉伸应变计方面的应用,这些应用表现出了非凡的性能。晶体管在 -0.75 V 的漏极偏压下表现出的空穴和电子迁移率分别为 1100 ± 70 和 550 ± 50 cm²/(V s)。应变传感器的压阻应变系数约为 6.1。这些方法朝着在晶圆级实现石墨烯器件以及在光电、柔性和可拉伸电子产品中的应用迈出了重要的一步。

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