Yoshikawa Taro, Reusch Markus, Zuerbig Verena, Cimalla Volker, Lee Kee-Han, Kurzyp Magdalena, Arnault Jean-Charles, Nebel Christoph E, Ambacher Oliver, Lebedev Vadim
Fraunhofer Institute for Applied Solid State Physics, Tullastraße 72, 79108 Freiburg, Germany.
Department of Microsystems Engineering-IMTEK, University of Freiburg, Georges-Köhler-Allee 103, 79110 Freiburg, Germany.
Nanomaterials (Basel). 2016 Nov 17;6(11):217. doi: 10.3390/nano6110217.
Electrostatic self-assembly of diamond nanoparticles (DNPs) onto substrate surfaces (so-called nanodiamond seeding) is a notable technique, enabling chemical vapor deposition (CVD) of nanocrystalline diamond thin films on non-diamond substrates. In this study, we examine this technique onto differently polarized (either Al- or N-polar) -axis oriented sputtered aluminum nitride (AlN) film surfaces. This investigation shows that Al-polar films, as compared to N-polar ones, obtain DNPs with higher density and more homogeneously on their surfaces. The origin of these differences in density and homogeneity is discussed based on the hydrolysis behavior of AlN surfaces in aqueous suspensions.
将金刚石纳米颗粒（DNPs）静电自组装到基底表面（即所谓的纳米金刚石播种）是一项值得关注的技术，它能使纳米晶金刚石薄膜在非金刚石基底上进行化学气相沉积（CVD）。在本研究中，我们将该技术应用于不同极化（Al极或N极）轴取向的溅射氮化铝（AlN）薄膜表面。该研究表明，与N极薄膜相比，Al极薄膜在其表面获得了更高密度且分布更均匀的DNPs。基于AlN表面在水悬浮液中的水解行为，讨论了密度和均匀性这些差异的来源。
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