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在石英炉中通过化学气相沉积法制备无杂质石墨烯。

Contamination-free graphene by chemical vapor deposition in quartz furnaces.

机构信息

Energy Technologies Department (DTE), ENEA Casaccia, Via Anguillarese 301, 00123, Rome, Italy.

Department of Chemical Materials Environmental Engineering, Sapienza University of Rome, Via del Castro Laurenziano 7, 00161, Rome, Italy.

出版信息

Sci Rep. 2017 Aug 30;7(1):9927. doi: 10.1038/s41598-017-09811-z.

Abstract

Although the growth of graphene by chemical vapor deposition is a production technique that guarantees high crystallinity and superior electronic properties on large areas, it is still a challenge for manufacturers to efficiently scale up the production to the industrial scale. In this context, issues related to the purity and reproducibility of the graphene batches exist and need to be tackled. When graphene is grown in quartz furnaces, in particular, it is common to end up with samples contaminated by heterogeneous particles, which alter the growth mechanism and affect graphene's properties. In this paper, we fully unveil the source of such contaminations and explain how they create during the growth process. We further propose a modification of the widely used quartz furnace configuration to fully suppress the sample contamination and obtain identical and clean graphene batches on large areas.

摘要

虽然化学气相沉积法生长石墨烯是一种能够保证大面积高结晶度和优异电子性能的生产技术,但对于制造商来说,将其高效地扩展到工业规模仍然是一个挑战。在这种情况下,与石墨烯批次的纯度和重现性相关的问题仍然存在,需要加以解决。特别是当在石英炉中生长石墨烯时,通常会得到被异质颗粒污染的样品,这会改变生长机制并影响石墨烯的性能。在本文中,我们完全揭示了这种污染的来源,并解释了它们在生长过程中是如何产生的。我们进一步提出了对广泛使用的石英炉结构的改进,以完全抑制样品污染,并在大面积上获得相同且清洁的石墨烯批次。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6e69/5577164/f7e23d1e19b5/41598_2017_9811_Fig1_HTML.jpg

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