预测、测量并最小化微机电系统（MEMS）镜扫描误差，以提高激光扫描显微镜的速度和精度。

Anticipating, measuring, and minimizing MEMS mirror scan error to improve laser scanning microscopy's speed and accuracy.

作者信息

Giannini John P, York Andrew G, Shroff Hari

机构信息

Section on High Resolution Optical Imaging, National Institute of Biomedical Imaging and Bioengineering, National Institutes of Health, Bethesda, Maryland, United States of America.

Biophysics Program, University of Maryland, College Park, Maryland, United States of America.

出版信息

PLoS One. 2017 Oct 3;12(10):e0185849. doi: 10.1371/journal.pone.0185849. eCollection 2017.

DOI:10.1371/journal.pone.0185849

PMID:28973013

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5626505/

Abstract

We describe a method to speed up microelectromechanical system (MEMS) mirror scanning by > 20x, while also improving scan accuracy. We use Landweber deconvolution to determine an input voltage which would produce a desired output, based on the measured MEMS impulse response. Since the MEMS is weakly nonlinear, the observed behavior deviates from expectations, and we iteratively improve our input to minimize this deviation. This allows customizable MEMS angle vs. time with <1% deviation from the desired scan pattern. We demonstrate our technique by optimizing a point scanning microscope's raster patterns to image mammal submandibular gland and pollen at ~10 frames/s.

摘要

我们描述了一种将微机电系统（MEMS）镜扫描速度提高20倍以上的方法，同时还提高了扫描精度。我们使用Landweber反卷积，根据测量的MEMS脉冲响应来确定能够产生所需输出的输入电压。由于MEMS具有弱非线性，观察到的行为与预期有所偏差，我们通过迭代改进输入来最小化这种偏差。这使得能够定制MEMS角度与时间的关系，与所需扫描模式的偏差小于1%。我们通过优化点扫描显微镜的光栅图案，以~10帧/秒的速度对哺乳动物下颌下腺和花粉进行成像，展示了我们的技术。