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通过直接激光轨迹编程提高3D立体光刻的分辨率:在微流控确定性侧向位移装置中的应用

Resolution improvement of 3D stereo-lithography through the direct laser trajectory programming: Application to microfluidic deterministic lateral displacement device.

作者信息

Juskova Petra, Ollitrault Alexis, Serra Marco, Viovy Jean-Louis, Malaquin Laurent

机构信息

Laboratoire Physico Chimie Curie, Institut Curie, PSL Research University, CNRS UMR168, 75005, Paris, France; Sorbonne Universités, UPMC Univ Paris 06, 75005, Paris, France; Institut Pierre-Gilles de Gennes, 75005, Paris, France.

Laboratoire Physico Chimie Curie, Institut Curie, PSL Research University, CNRS UMR168, 75005, Paris, France; Sorbonne Universités, UPMC Univ Paris 06, 75005, Paris, France; Institut Pierre-Gilles de Gennes, 75005, Paris, France.

出版信息

Anal Chim Acta. 2018 Feb 13;1000:239-247. doi: 10.1016/j.aca.2017.11.062. Epub 2017 Dec 6.

Abstract

The vast majority of current microfluidic devices are produced using soft lithography, a technique with strong limitations regarding the fabrication of three-dimensional architectures. Additive manufacturing holds great promises to overcome these limitations, but conventional machines still lack the resolution required by most microfluidic applications. 3D printing machines based on two-photon lasers, in contrast, have the needed resolution but are too limited in speed and size of the global device. Here we demonstrate how the resolution of conventional stereolithographic machines can be improved by a direct programming of the laser path and can contribute to bridge the gap between the two above technologies, allowing the direct printing of features between 10 and 100 μm, corresponding to a large fraction of microfluidic applications. This strategy allows to achieve resolutions limited only by the physical size of the laser beam, decreasing by a factor at least 2× the size of the smallest features printable, and increasing their reproducibility by a factor 5. The approach was applied to produce an open microfluidic device with the reversible seal, integrating periodical patterns using the simple motifs, and validated by the fabrication of a deterministic lateral displacement particles sorting device. The sorting of polystyrene beads (diameter: 20 μm and 45 μm) was achieved with a specificity >95%, comparable with that achieved with arrays prepared by microlithography.

摘要

当前绝大多数微流控设备是使用软光刻技术制造的,该技术在三维结构制造方面存在很大局限性。增材制造有望克服这些局限性,但传统机器仍缺乏大多数微流控应用所需的分辨率。相比之下,基于双光子激光的3D打印机具有所需的分辨率,但在整体设备的速度和尺寸方面受到很大限制。在此,我们展示了如何通过直接对激光路径进行编程来提高传统立体光刻机器的分辨率,并有助于弥合上述两种技术之间的差距,从而能够直接打印出10至100微米的特征,这涵盖了很大一部分微流控应用。这种策略能够实现仅受激光束物理尺寸限制的分辨率,将可打印的最小特征尺寸减小至少2倍,并将其重现性提高5倍。该方法被应用于制造具有可逆密封的开放式微流控设备,使用简单图案集成周期性图案,并通过制造确定性横向位移粒子分选设备进行了验证。对聚苯乙烯珠(直径:20微米和45微米)的分选特异性>95%,与通过微光刻制备的阵列所达到的分选特异性相当。

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