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基于双梳干涉测量法的线扫描光谱编码成像。

Line-scan spectrum-encoded imaging by dual-comb interferometry.

作者信息

Wang Chao, Deng Zejiang, Gu Chenglin, Liu Yang, Luo Daping, Zhu Zhiwei, Li Wenxue, Zeng Heping

出版信息

Opt Lett. 2018 Apr 1;43(7):1606-1609. doi: 10.1364/OL.43.001606.

Abstract

Herein, the method of spectrum-encoded dual-comb interferometry is introduced to measure a three-dimensional (3-D) profile with absolute distance information. By combining spectral encoding for wavelength-to-space mapping, dual-comb interferometry for decoding and optical reference for calibration, this system can obtain a 3-D profile of an object at a stand-off distance of 114 mm with a depth precision of 12 μm. With the help of the reference arm, the absolute distance, reflectivity distribution, and depth information are simultaneously measured at a 5 kHz line-scan rate with free-running carrier-envelope offset frequencies. To verify the concept, experiments are conducted with multiple objects, including a resolution test chart, a three-stair structure, and a designed "ECNU" letter chain. The results show a horizontal resolution of ∼22  μm and a measurement range of 1.93 mm.

摘要

在此,引入了光谱编码双梳干涉测量法来测量具有绝对距离信息的三维(3-D)轮廓。通过将用于波长到空间映射的光谱编码、用于解码的双梳干涉测量法以及用于校准的光学参考相结合,该系统能够在114毫米的远距离处获得物体的三维轮廓,深度精度为12微米。借助参考臂,在自由运行的载波包络偏移频率下,以5千赫兹的线扫描速率同时测量绝对距离、反射率分布和深度信息。为了验证这一概念,对多个物体进行了实验,包括分辨率测试图、三层楼梯结构和设计的“ECNU”字母链。结果显示水平分辨率约为22微米,测量范围为1.93毫米。

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