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适用于超灵敏柔性传感器的线型铟镓锌氧化物薄膜晶体管的简易制造

Facile fabrication of wire-type indium gallium zinc oxide thin-film transistors applicable to ultrasensitive flexible sensors.

作者信息

Kim Yeong-Gyu, Tak Young Jun, Kim Hee Jun, Kim Won-Gi, Yoo Hyukjoon, Kim Hyun Jae

机构信息

School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-ro, Seodaemun-gu, Seoul, 03722, Republic of Korea.

出版信息

Sci Rep. 2018 Apr 3;8(1):5546. doi: 10.1038/s41598-018-23892-4.

DOI:10.1038/s41598-018-23892-4
PMID:29615757
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5882893/
Abstract

We fabricated wire-type indium gallium zinc oxide (IGZO) thin-film transistors (TFTs) using a self-formed cracked template based on a lift-off process. The electrical characteristics of wire-type IGZO TFTs could be controlled by changing the width and density of IGZO wires through varying the coating conditions of template solution or multi-stacking additional layers. The fabricated wire-type devices were applied to sensors after functionalizing the surface. The wire-type pH sensor showed a sensitivity of 45.4 mV/pH, and this value was an improved sensitivity compared with that of the film-type device (27.6 mV/pH). Similarly, when the wire-type device was used as a glucose sensor, it showed more variation in electrical characteristics than the film-type device. The improved sensing properties resulted from the large surface area of the wire-type device compared with that of the film-type device. In addition, we fabricated wire-type IGZO TFTs on flexible substrates and confirmed that such structures were very resistant to mechanical stresses at a bending radius of 10 mm.

摘要

我们基于剥离工艺使用自形成的裂纹模板制造了线型铟镓锌氧化物（IGZO）薄膜晶体管（TFT）。通过改变模板溶液的涂覆条件或多层堆叠额外的层来改变IGZO线的宽度和密度，可以控制线型IGZO TFT的电学特性。在对表面进行功能化处理后，将制造的线型器件应用于传感器。线型pH传感器的灵敏度为45.4 mV/pH，与薄膜型器件（27.6 mV/pH）相比，该值的灵敏度有所提高。同样，当线型器件用作葡萄糖传感器时，其电学特性的变化比薄膜型器件更大。与薄膜型器件相比，线型器件的表面积更大，从而导致传感性能得到改善。此外，我们在柔性基板上制造了线型IGZO TFT，并证实这种结构在弯曲半径为10 mm时对机械应力具有很强的抵抗力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5e90/5882893/8ae0030709c9/41598_2018_23892_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5e90/5882893/8b6eb7a9d23a/41598_2018_23892_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5e90/5882893/a9d570fe48de/41598_2018_23892_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5e90/5882893/149ed1d1cf81/41598_2018_23892_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5e90/5882893/8298c43007db/41598_2018_23892_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5e90/5882893/8ae0030709c9/41598_2018_23892_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5e90/5882893/8b6eb7a9d23a/41598_2018_23892_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5e90/5882893/a9d570fe48de/41598_2018_23892_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5e90/5882893/149ed1d1cf81/41598_2018_23892_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5e90/5882893/8298c43007db/41598_2018_23892_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5e90/5882893/8ae0030709c9/41598_2018_23892_Fig5_HTML.jpg

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