Yu Jingxue, Li Jie, Zhang Wenfeng, Chang Haixin
Center for Joining and Electronic Packaging , State Key Laboratory of Material Processing and Die & Mould Technology , School of Materials Science and Engineering , Huazhong University of Science and Technology , Wuhan 430074 , China . Email:
Chem Sci. 2015 Dec 1;6(12):6705-6716. doi: 10.1039/c5sc01941a. Epub 2015 Aug 3.
Two-dimensional (2D) materials have attracted much attention due to their unique properties and great potential in various applications. Controllable synthesis of 2D materials with high quality and high efficiency is essential for their large scale applications. Chemical vapor deposition (CVD) has been one of the most important and reliable techniques for the synthesis of 2D materials. In this perspective, the recent advances in the CVD growth of three typical types of two-dimensional materials, graphene, boron nitride and transition metal dichalcogenides (TMDs), are briefly introduced. Large area preparation, single crystal growth and some mechanistic insight are discussed with details. Finally we give a brief comment on the challenges of CVD growth of 2D materials.
二维(2D)材料因其独特的性质以及在各种应用中的巨大潜力而备受关注。高质量、高效率地可控合成二维材料对于其大规模应用至关重要。化学气相沉积(CVD)一直是合成二维材料最重要且可靠的技术之一。从这个角度出发,简要介绍了三种典型二维材料——石墨烯、氮化硼和过渡金属二硫属化物(TMDs)的CVD生长方面的最新进展。详细讨论了大面积制备、单晶生长以及一些机理见解。最后,我们对二维材料CVD生长面临的挑战给出简要评论。