Department of Materials Science and Engineering, National Cheng Kung University, Tainan 70101, Taiwan.
Microsc Microanal. 2013 Aug;19 Suppl 5:4-7. doi: 10.1017/S143192761301221X.
In this study, bicrystals of silver (Ag) and aluminum (Al) were used to investigate the physical spatial resolution of the electron backscatter diffraction system combining a digital image correlation method. Furthermore, the effect of the accelerating voltage and probe current was investigated on the physical spatial resolution of the lateral and longitudinal resolutions for Ag and Al, respectively. The lateral and longitudinal resolutions show high dependency on the accelerating voltage for a low atomic mass material of Al, In addition, these are almost independent of the accelerating voltage for a high atomic mass material of Ag. Moreover, the probe current does not play any role on both the lateral and longitudinal resolutions. The best lateral resolutions for Al and Ag are 40.5 and 12.1 nm at 10 kV and 1 nA, respectively. The best longitudinal resolutions of 23.2 and 80 nm were obtained at 10 kV and 1 nA for Al and Ag, respectively.
在这项研究中，使用了银（Ag）和铝（Al）的双晶体来研究结合数字图像相关方法的电子背散射衍射系统的物理空间分辨率。此外，还分别研究了加速电压和探针电流对 Ag 和 Al 的横向和纵向分辨率的物理空间分辨率的影响。对于低原子质量材料 Al，横向和纵向分辨率对加速电压具有高度依赖性。此外，对于高原子质量材料 Ag，这些分辨率几乎与加速电压无关。此外，探针电流对横向和纵向分辨率都没有任何作用。在 10 kV 和 1 nA 时，Al 和 Ag 的最佳横向分辨率分别为 40.5nm 和 12.1nm。在 10 kV 和 1 nA 时，Al 和 Ag 的最佳纵向分辨率分别为 23.2nm 和 80nm。
