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基于集成晶格匹配 II 型 Se/n-Si 异质结的高性能硅兼容大面积紫外至可见宽带光电探测器。

High-Performance Silicon-Compatible Large-Area UV-to-Visible Broadband Photodetector Based on Integrated Lattice-Matched Type II Se/n-Si Heterojunctions.

机构信息

Department of Materials Science , Fudan University , Shanghai 200433 , P. R. China.

出版信息

Nano Lett. 2018 Aug 8;18(8):4697-4703. doi: 10.1021/acs.nanolett.8b00988. Epub 2018 Jul 31.

DOI:10.1021/acs.nanolett.8b00988
PMID:30052044
Abstract

A gold-induced NHCl-assisted vapor-based route is proposed and developed to achieve vertically aligned submicron Se crystals on lattice-matched (111)-oriented silicon substrates, based on which a high-performance large-area silicon-compatible photodetector is constructed. Thanks to the energy band structure and the strongly asymmetrical depletion region, the fabricated Se/Si device maintains a similar wavelength cutoff to that of selenium devices before the IR region, along with a high-performance broadband photoresponse in the UV-to-visible region. The large-area photodetector maintains a very low leakage current under a -2 V bias, and a high on/off ratio of 10-10 is obtained with a high photocurrent of 62 nA at 500 nm. A photoresponse is clearly observed when the bias voltage is removed. The pulse response precisely provides a high response speed (τ + τ ≈ 1.975 ms), exceeding the fastest Se-based photodetectors in current reports. The enhanced photoelectric properties and the self-power photoresponse mainly derive from the integrated high-quality Se/n-Si p-n heterojunctions with both lattice match and type II energy band match.

摘要

提出并发展了一种基于金诱导 NHCl 辅助气相的路线,以在晶格匹配的(111)取向硅衬底上实现垂直排列的亚微米硒晶体,基于此构建了一种高性能的大面积硅兼容光电探测器。得益于能带结构和强烈的不对称耗尽区,所制备的 Se/Si 器件在红外区域之前保持与硒器件相似的波长截止,同时在紫外至可见区域具有高性能的宽带光响应。大面积光电探测器在-2 V 偏压下保持非常低的泄漏电流,并且在 500nm 时获得 62nA 的高光电流,得到 10-10 的高开关比。当偏置电压被移除时,可清楚地观察到光响应。脉冲响应精确地提供了高响应速度(τ + τ ≈ 1.975ms),超过了当前报告中最快的基于硒的光电探测器。增强的光电性能和自供电光响应主要源于具有晶格匹配和 II 型能带匹配的集成高质量 Se/n-Si p-n 异质结。

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