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基于两个耦合线性谐振器的差分谐振微机电系统传感器的极限

Ultimate Limits of Differential Resonant MEMS Sensors Based on Two Coupled Linear Resonators.

作者信息

Juillard Jerome, Prache Pierre, Maris Ferreira Pietro, Barniol Nuria

出版信息

IEEE Trans Ultrason Ferroelectr Freq Control. 2018 Dec;65(12):2440-2448. doi: 10.1109/TUFFC.2018.2869415. Epub 2018 Sep 10.

DOI:10.1109/TUFFC.2018.2869415
PMID:30207952
Abstract

In this paper, we investigate how additive noise, e.g., thermomechanical noise, impacts the resolution of mode-localized resonant sensing architectures based on two passively coupled linear resonators. Existing work suggests that the ultimate resolution of these sensors can be improved by decreasing the coupling coefficient of the resonators. The present work gives an analytical proof that this result does not hold, and that the resolution of such sensors is actually independent of the coupling strength. These results are established for different output metrics and operating points, in closed loop and in open loop, and compared to those obtained with other approaches based on actively coupled resonators.

摘要

在本文中,我们研究了加性噪声,例如热机械噪声,如何影响基于两个被动耦合线性谐振器的模式局部化谐振传感架构的分辨率。现有工作表明,通过降低谐振器的耦合系数可以提高这些传感器的最终分辨率。本工作给出了一个分析证明,即该结果不成立,并且此类传感器的分辨率实际上与耦合强度无关。这些结果是针对不同的输出指标和工作点、在闭环和开环情况下建立的,并与基于主动耦合谐振器的其他方法所获得的结果进行了比较。

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引用本文的文献

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A decouple-decomposition noise analysis model for closed-loop mode-localized tilt sensors.一种用于闭环模式局部倾斜传感器的解耦-分解噪声分析模型。
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2
Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√Hz noise floor.处于非线性达芬振子状态的模式局部化加速度计,偏置不稳定性为75纳克,本底噪声为95纳克/√赫兹。
Microsyst Nanoeng. 2022 Feb 7;8:17. doi: 10.1038/s41378-021-00340-4. eCollection 2022.
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Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review.
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Micromachines (Basel). 2021 Nov 4;12(11):1361. doi: 10.3390/mi12111361.