Hueting Raymond J E
MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500AE Enschede, The Netherlands.
Micromachines (Basel). 2018 Nov 7;9(11):582. doi: 10.3390/mi9110582.
For some years now, the ever continuing dimensional scaling has no longer been considered to be sufficient for the realization of advanced CMOS devices. Alternative approaches, such as employing new materials and introducing new device architectures, appear to be the way to go forward. A currently hot approach is to employ ferroelectric materials for obtaining a positive feedback in the gate control of a switch. This work elaborates on two device architectures based on this approach: the negative-capacitance and the piezoelectric field-effect transistor, i.e., the NC-FET (negative-capacitance field-effect transistor), respectively π -FET. It briefly describes their operation principle and compares those based on earlier reports. For optimal performance, the adopted ferroelectric material in the NC-FET should have a relatively wide polarization-field loop (i.e., "hard" ferroelectric material). Its optimal remnant polarization depends on the NC-FET architecture, although there is some consensus in having a low value for that (e.g., HZO (Hafnium-Zirconate)). π -FET is the piezoelectric coefficient, hence its polarization-field loop should be as high as possible (e.g., PZT (lead-zirconate-titanate)). In summary, literature reports indicate that the NC-FET shows better performance in terms of subthreshold swing and on-current. However, since its operation principle is based on a relatively large change in polarization the maximum speed, unlike in a π -FET, forms a big issue. Therefore, for future low-power CMOS, a hybrid solution is proposed comprising both device architectures on a chip where hard ferroelectric materials with a high piezocoefficient are used.
多年来,持续不断的尺寸缩放已不再被认为足以实现先进的CMOS器件。诸如采用新材料和引入新器件架构等替代方法似乎是前进的方向。当前一种热门方法是采用铁电材料以在开关的栅极控制中获得正反馈。这项工作详细阐述了基于该方法的两种器件架构:负电容和压电场效应晶体管,即分别为NC-FET(负电容场效应晶体管)和π-FET。它简要描述了它们的工作原理,并与早期报告中的原理进行了比较。为了实现最佳性能,NC-FET中采用的铁电材料应具有相对较宽的极化场回线(即“硬”铁电材料)。其最佳剩余极化取决于NC-FET架构,尽管对于该值较低这一点存在一些共识(例如HZO(锆酸铪))。π-FET是压电系数,因此其极化场回线应尽可能高(例如PZT(锆钛酸铅))。总之,文献报告表明NC-FET在亚阈值摆幅和导通电流方面表现出更好的性能。然而,由于其工作原理基于极化的相对较大变化,与π-FET不同,其最大速度成为一个大问题。因此,对于未来的低功耗CMOS,提出了一种混合解决方案,即在芯片上同时包含这两种器件架构,并使用具有高压电系数的硬铁电材料。