Bru Luis A, Pastor Daniel, Muñoz Pascual
Opt Express. 2018 Nov 12;26(23):30000-30008. doi: 10.1364/OE.26.030000.
Because of the demand for advanced measurement systems in the field of modern photonic integrated circuits, optical frequency domain reflectometry (OFDR) is a robust technique for characterizing design-to-fabrication deviations. In this paper we report an OFDR device where the interferometric part is monolithically integrated along with the device under test. We discuss the advantages in terms of compactness and performance, and the importance of the incorporated dispersion de-embedding mechanism. Experimental validation is carried out by interrogating an arrayed waveguide grating on a silicon nitride platform. The results establish the proposed device as a first step in the quest for a universal test structure for integrated devices.
由于现代光子集成电路领域对先进测量系统的需求，光学频域反射ometry（OFDR）是一种用于表征设计到制造偏差的强大技术。在本文中，我们报告了一种OFDR装置，其中干涉部分与被测装置单片集成。我们讨论了在紧凑性和性能方面的优势，以及所采用的色散去嵌入机制的重要性。通过对氮化硅平台上的阵列波导光栅进行询问来进行实验验证。结果表明，所提出的装置是寻求集成器件通用测试结构的第一步。
