玻璃微流控器件的制造
Fabrication of Glass Microfluidic Devices.
作者信息
Culbertson Christopher T, Sibbitts Jay, Sellens Kathleen, Jia Shu
机构信息
Department of Chemistry, Kansas State University, Manhattan, KS, USA.
出版信息
Methods Mol Biol. 2019;1906:1-12. doi: 10.1007/978-1-4939-8964-5_1.
PMID:30488382
Abstract
This chapter provides step-by-step procedures for the fabrication of glass-based microfluidic devices. These procedures include device design, photomask generation, photolithography, channel etching, and high-temperature bonding.
摘要
本章提供了基于玻璃的微流控器件制造的分步程序。这些程序包括器件设计、光掩模生成、光刻、通道蚀刻和高温键合。
Zotero 插件