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Nanoscribe IP-Dip 光刻胶层的曝光相关折射率。

Exposure-dependent refractive index of Nanoscribe IP-Dip photoresist layers.

出版信息

Opt Lett. 2019 Jan 1;44(1):29-32. doi: 10.1364/OL.44.000029.

Abstract

The refractive indices of photoresists used for direct laser writing (DLW) have been determined after exposure to ultraviolet (UV) light. However, it was anticipated that the refractive index will differ when applying a two-photon polymerization (TPP) process. In this Letter, we demonstrate that this is indeed the case. Making use of a guided mode coupling approach, we measure the dispersive real part of the refractive index (n) of a commercial photoresist (IP-Dip, Nanoscribe) at very high accuracy. Additionally, the imaginary part of the refractive index (k) is determined from absorption measurements for wavelengths in the range 300 to 1700 nm. TPP layers exhibit a significantly lower refractive index than their UV exposed bulk counterparts (Δn up to 0.01). Furthermore, when fabricating a TPP shell and UV exposing the interior, the refractive index of the shell will not change. This is an important consideration for optical component design and opens the possibility for low refractive index difference wave guiding.

摘要

已测定用于直接激光写入 (DLW) 的光致抗蚀剂在暴露于紫外 (UV) 光后的折射率。然而,预计在应用双光子聚合 (TPP) 工艺时折射率会有所不同。在本信中,我们证明了这确实是事实。利用导模耦合方法,我们以非常高的精度测量了商业光致抗蚀剂 (Nanoscribe 的 IP-Dip) 的色散实部折射率 (n)。此外,折射率的虚部 (k) 是根据 300 到 1700nm 波长范围内的吸收测量确定的。TPP 层的折射率明显低于其 UV 曝光的块状对应物 (Δn 高达 0.01)。此外,当制造 TPP 壳并对内部进行 UV 曝光时,壳的折射率不会改变。这对于光学元件设计是一个重要的考虑因素,并为低折射率差波导开辟了可能性。

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