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通过砷烯中厚度调制的半导体到金属转变实现的无掺杂砷烯异质结构金属氧化物半导体场效应晶体管

Doping-Free Arsenene Heterostructure Metal-Oxide-Semiconductor Field Effect Transistors Enabled by Thickness Modulated Semiconductor to Metal Transition in Arsenene.

作者信息

Seo Dongwook, Chang Jiwon

机构信息

Department of Electrical and Computer Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulsan, 44919, South Korea.

出版信息

Sci Rep. 2019 Mar 8;9(1):3988. doi: 10.1038/s41598-019-40675-7.

DOI:10.1038/s41598-019-40675-7
PMID:30850758
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6408428/
Abstract

Two-dimensional (2-D) materials such as MoS and phosphorene provide an ideal platform to realize extremely thin body metal-oxide-semiconductor field effect transistors (MOSFETs) which is highly immune to short channel effects in the ultra-scaled regime. Even with the excellent electrostatic integrity inherent in 2-D system, however, 2-D materials suffer from the lack of efficient doping method which is crucial in MOSFETs technology. Recently, an unusual phase transition from semiconductor to metal driven by the thickness modulation has been predicted in mono-elemental 2-D material arsenene. Utilizing this extraordinary property, we propose doping-free arsenene heterostructure MOSFETs based on the lateral multilayer (metallic source)/monolayer (semiconducting channel)/multilayer (metallic drain) arsenene heterostructure. Metallic multilayer arsenene in the source and drain can serve as electrodes without doping. We investigate the potential performance of arsenene heterostructure MOSFETs through atomistic simulations using density functional theory and nonequilibrium Green's function. The intrinsic upper limit of the on-state current in arsenene heterostructure MOSFETs is estimated by studying the effect of layer number in the source and drain. We comprehensively analyze the competitiveness of arsenene heterostructure MOSFETs through benchmarking with monolayer arsenene homostructure MOSFETs equipped with the highly degenerate doped source and drain, suggesting superior performance of heterostructure MOSFETs over homostructure MOSFETs.

摘要

二维(2-D)材料,如二硫化钼(MoS)和磷烯,为实现极薄体金属氧化物半导体场效应晶体管(MOSFET)提供了一个理想平台,这种晶体管在超缩放 regime 中对短沟道效应具有高度免疫力。然而,即使二维系统具有出色的静电完整性,二维材料仍缺乏有效的掺杂方法,而这在 MOSFET 技术中至关重要。最近,在单元素二维材料砷烯中预测到了一种由厚度调制驱动的从半导体到金属的异常相变。利用这一非凡特性,我们提出了基于横向多层(金属源极)/单层(半导体沟道)/多层(金属漏极)砷烯异质结构的无掺杂砷烯异质结构 MOSFET。源极和漏极中的金属多层砷烯可以作为无需掺杂的电极。我们使用密度泛函理论和非平衡格林函数通过原子模拟研究了砷烯异质结构 MOSFET 的潜在性能。通过研究源极和漏极中层数的影响,估计了砷烯异质结构 MOSFET 导通电流的固有上限。我们通过与配备高度简并掺杂源极和漏极的单层砷烯同质结构 MOSFET 进行基准测试,全面分析了砷烯异质结构 MOSFET 的竞争力,表明异质结构 MOSFET 比同质结构 MOSFET 具有更优异的性能。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1cf/6408428/a892c5d72e5a/41598_2019_40675_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1cf/6408428/aa8406ef3722/41598_2019_40675_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1cf/6408428/aeef449198ae/41598_2019_40675_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1cf/6408428/f1ccc119fb9c/41598_2019_40675_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1cf/6408428/98c3b11fedb1/41598_2019_40675_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1cf/6408428/cd1bb8991deb/41598_2019_40675_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1cf/6408428/a892c5d72e5a/41598_2019_40675_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1cf/6408428/aa8406ef3722/41598_2019_40675_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1cf/6408428/aeef449198ae/41598_2019_40675_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1cf/6408428/f1ccc119fb9c/41598_2019_40675_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1cf/6408428/98c3b11fedb1/41598_2019_40675_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1cf/6408428/cd1bb8991deb/41598_2019_40675_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/f1cf/6408428/a892c5d72e5a/41598_2019_40675_Fig6_HTML.jpg

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