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氮化铟镓血小板:用于绿色和红色发光二极管的合成与应用。

InGaN Platelets: Synthesis and Applications toward Green and Red Light-Emitting Diodes.

作者信息

Bi Zhaoxia, Lenrick Filip, Colvin Jovana, Gustafsson Anders, Hultin Olof, Nowzari Ali, Lu Taiping, Wallenberg Reine, Timm Rainer, Mikkelsen Anders, Ohlsson B Jonas, Storm Kristian, Monemar Bo, Samuelson Lars

机构信息

RISE Research Institutes of Sweden AB , 22370 Lund , Sweden.

出版信息

Nano Lett. 2019 May 8;19(5):2832-2839. doi: 10.1021/acs.nanolett.8b04781. Epub 2019 Apr 12.

DOI:10.1021/acs.nanolett.8b04781
PMID:30938533
Abstract

In this work, we present a method to synthesize arrays of hexagonal InGaN submicrometer platelets with a top c-plane area having an extension of a few hundred nanometers by selective area metal-organic vapor-phase epitaxy. The InGaN platelets were made by in situ annealing of InGaN pyramids, whereby InGaN from the pyramid apex was thermally etched away, leaving a c-plane surface, while the inclined {101̅1} planes of the pyramids were intact. The as-formed c-planes, which are rough with islands of a few tens of nanometers, can be flattened with InGaN regrowth, showing single bilayer steps and high-quality optical properties (full width at half-maximum of photoluminescence at room temperature: 107 meV for InGaN and 151 meV for InGaN). Such platelets offer surfaces having relaxed lattice constants, thus enabling shifting the quantum well emission from blue (as when grown on GaN) to green and red. For single InGaN quantum wells grown on the c-plane of such InGaN platelets, a sharp interface between the quantum well and the barriers was observed. The emission energy from the quantum well, grown under the same conditions, was shifted from 2.17 eV on InGaN platelets to 1.95 eV on InGaN platelets as a result of a thicker quantum well and a reduced indium pulling effect on InGaN platelets. On the basis of this method, prototype light-emitting diodes were demonstrated with green emission on InGaN platelets and red emission on InGaN platelets.

摘要

在这项工作中,我们展示了一种通过选择性区域金属有机气相外延法合成六边形氮化铟镓亚微米级片阵列的方法,其顶部c平面区域延伸几百纳米。氮化铟镓片是通过对氮化铟镓金字塔进行原位退火制成的,由此金字塔顶端的氮化铟镓被热蚀刻掉,留下一个c平面表面,而金字塔的倾斜{101̅1}面保持完整。形成的c平面表面粗糙,有几十纳米的岛状物,可以通过氮化铟镓再生长使其变平,显示出单层台阶和高质量的光学特性(室温下光致发光半高宽:氮化铟镓为107毫电子伏特,氮化铟镓为151毫电子伏特)。这种片提供了具有弛豫晶格常数的表面,从而能够将量子阱发射从蓝色(如在氮化镓上生长时)转变为绿色和红色。对于生长在这种氮化铟镓片c平面上的单个氮化铟镓量子阱,观察到量子阱与势垒之间有清晰的界面。在相同条件下生长的量子阱的发射能量,由于量子阱更厚以及氮化铟镓片上铟拉效应减小,从氮化铟镓片上的2.17电子伏特转变为氮化铟镓片上的1.95电子伏特。基于此方法,展示了原型发光二极管,在氮化铟镓片上发出绿色光,在氮化铟镓片上发出红色光。

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引用本文的文献

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Scalable InGaN nanowire µ-LEDs: paving the way for next-generation display technology.可扩展的氮化铟镓纳米线微发光二极管:为下一代显示技术铺平道路。
Natl Sci Rev. 2024 Sep 20;12(1):nwae306. doi: 10.1093/nsr/nwae306. eCollection 2025 Jan.
2
Realization of Ultrahigh Quality InGaN Platelets to be Used as Relaxed Templates for Red Micro-LEDs.实现用于红色微型发光二极管的超高质量氮化铟镓血小板作为弛豫模板
ACS Appl Mater Interfaces. 2020 Apr 15;12(15):17845-17851. doi: 10.1021/acsami.0c00951. Epub 2020 Apr 2.