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溶液处理金属氧化物薄膜晶体管:近期发展综述。

Solution-processed metal-oxide thin-film transistors: a review of recent developments.

机构信息

School of Electronic and Information Engineering, South China University of Technology, Guangzhou 510640, People's Republic of China.

出版信息

Nanotechnology. 2019 Aug 2;30(31):312001. doi: 10.1088/1361-6528/ab1860. Epub 2019 Apr 11.

Abstract

Driven by the rapid development of novel active-matrix displays, thin-film transistors (TFTs) based on metal-oxide (MO) semiconductors have drawn great attention during recent years. N-type MO TFTs manufactured through vacuum-based processes have the advantages of higher mobility compared to the amorphous silicon TFTs, better uniformity and lower processing temperature compared to the polysilicon TFTs, and visible light transparency which is suitable for transparent electronic devices, etc. However, the fabrication cost is high owing to the expensive and complicated vacuum-based systems. In contrast, solution process has the advantages of low cost, high throughput, and easy chemical composition control. In the first part of this review, a brief introduction of solution-processed MO TFTs is given, and the main issues and challenges encountered in this field are discussed. The recent advances in channel layer engineering to obtain the state-of-the-art solution-processed MO TFTs are reviewed and summarized. Afterward, a detailed discussion of the direct patterning methods is presented, including the direct photopatterning and printing techniques. Next, the effect of gate dielectric materials and their interfaces on the performance of the resulting TFTs are surveyed. The last topic is the various applications of solution-processed MO TFTs, from novel displays to sensing, memory devices, etc. Finally, conclusions are drawn and future expectations for solution-processed MO TFTs and their applications are described.

摘要

受新型有源矩阵显示器快速发展的推动,近年来基于金属氧化物 (MO) 半导体的薄膜晶体管 (TFT) 引起了极大的关注。通过真空工艺制造的 N 型 MO TFT 与非晶硅 TFT 相比具有更高的迁移率,与多晶硅 TFT 相比具有更好的均匀性和更低的加工温度,以及适合透明电子设备的可见光透明度等优点。然而,由于昂贵且复杂的真空系统,制造成本很高。相比之下,溶液处理具有成本低、产量高和易于化学成分控制的优点。在这篇综述的第一部分,简要介绍了溶液处理的 MO TFT,并讨论了该领域遇到的主要问题和挑战。综述了获得最新状态的溶液处理 MO TFT 的通道层工程的最新进展。之后,详细讨论了直接图案化方法,包括直接光图案化和打印技术。接下来,研究了栅极介电材料及其界面对所得 TFT 性能的影响。最后一个主题是溶液处理的 MO TFT 的各种应用,从新型显示器到传感、存储器件等。最后,得出了结论,并描述了对溶液处理的 MO TFT 及其应用的未来期望。

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