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基于石墨烯-纳米壁/硅异质结光热电子效应的红外光电探测器

Infrared Photodetector Based on the Photothermionic Effect of Graphene-Nanowall/Silicon Heterojunction.

作者信息

Liu Xiangzhi, Zhou Quan, Luo Shi, Du Haiwei, Cao Zhensong, Peng Xiaoyu, Feng Wenlin, Shen Jun, Wei Dapeng

机构信息

Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology , Chinese Academy of Sciences , Chongqing 400714 , P. R. China.

Department of Applied Physics , Chongqing University of Technology , Chongqing 400054 , P. R. China.

出版信息

ACS Appl Mater Interfaces. 2019 May 15;11(19):17663-17669. doi: 10.1021/acsami.9b03329. Epub 2019 Apr 30.

Abstract

Because of the slow relaxation process according to weak acoustic phonon interaction, the photothermionic effect in graphene could be much more obvious than in the metal film, so a graphene heterojunction photodetector based on the photothermionic effect is promising for infrared imaging applications. However, the 2.3% absorption rate of the graphene film presents a severe limitation. Here, in situ grown graphene nanowalls (GNWs) were integrated on the silicon substrate interfaced with Au nanoparticles. Because of the strong infrared absorption and hot-carrier relaxation process in GNWs, the as-prepared GNWs/Au/silicon heterojunction has a photo to dark ratio of 2 × 10, responsivity of 138 mA/W, and linear dynamic range of 89.7 dB, with a specific detectivity of 1.4 × 10 and 1.6 × 10 cm Hz/W based on calculated and measured noise, respectively, in 1550 nm at room temperature, and has the best performance among silicon-compatible infrared photodetectors without any complicated waveguide structures. Obvious photoresponses are also detected in the mid-infrared and terahertz band. The interface Au particle is found to reduce the barrier height and enhance absorption. The device structure in this report could be compatible with the semiconductor process, so that infrared photodetectors with high integration density and low cost could be potentially realized.

摘要

由于弱声学声子相互作用导致的弛豫过程缓慢,石墨烯中的光热电子效应可能比金属膜中更为明显,因此基于光热电子效应的石墨烯异质结光电探测器在红外成像应用方面具有广阔前景。然而,石墨烯薄膜2.3%的吸收率是一个严重限制。在此,原位生长的石墨烯纳米壁(GNWs)被集成在与金纳米颗粒界面接触的硅衬底上。由于GNWs中强烈的红外吸收和热载流子弛豫过程,所制备的GNWs/Au/硅异质结在室温下1550nm处的光暗比为2×10,响应度为138mA/W,线性动态范围为89.7dB,基于计算和测量的噪声,比探测率分别为1.4×10和1.6×10 cm Hz/W,并且在没有任何复杂波导结构的硅兼容红外光电探测器中具有最佳性能。在中红外和太赫兹波段也检测到明显的光响应。发现界面金颗粒降低了势垒高度并增强了吸收。本报告中的器件结构可与半导体工艺兼容,从而有可能实现具有高集成密度和低成本的红外光电探测器。

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